A concurrent pattern operation algorithm for VLSI mask data - researchr publication authors

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Tokinori Kozawa, Akira Tsukizoe, Jun'ya Sakemi, Chihei Miura, Tatsuki Ishii. A concurrent pattern operation algorithm for VLSI mask data. In Robert J. Smith II, editor, Proceedings of the 18th Design Automation Conference, DAC '81, Nashville, Tennessee, USA, June 29 - July 1, 1981. pages 563-570, ACM/IEEE, 1981. [doi]

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