A concurrent pattern operation algorithm for VLSI mask data

Tokinori Kozawa, Akira Tsukizoe, Jun'ya Sakemi, Chihei Miura, Tatsuki Ishii. A concurrent pattern operation algorithm for VLSI mask data. In Robert J. Smith II, editor, Proceedings of the 18th Design Automation Conference, DAC '81, Nashville, Tennessee, USA, June 29 - July 1, 1981. pages 563-570, ACM/IEEE, 1981. [doi]

Abstract

Abstract is missing.