Sigma-delta modulator based control systems for MEMS gyroscopes

Michael Kraft, Haitao Ding. Sigma-delta modulator based control systems for MEMS gyroscopes. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 41-46, IEEE, 2009. [doi]

Authors

Michael Kraft

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Haitao Ding

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