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Local stress analysis on semiconductor devices by combined experimental-numerical procedure

Rene Kregting, Sander Gielen, Willem D. van Driel, Paul Alkemade, Hozan Miro, Jan-Dirk Kamminga. Local stress analysis on semiconductor devices by combined experimental-numerical procedure. Microelectronics Reliability, 51(6):1092-1096, 2011. [doi]

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Rene Kregting

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Sander Gielen

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Willem D. van Driel

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Paul Alkemade

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Hozan Miro

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Jan-Dirk Kamminga

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