On the impact of mechanical stress on gate oxide trapping

A. Kruv, Ben Kaczer, A. Grill, M. Gonzalez, J. Franco, Dimitri Linten, Wolfgang Gös, Tibor Grasser, Ingrid De Wolf. On the impact of mechanical stress on gate oxide trapping. In 2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020. pages 1-5, IEEE, 2020. [doi]

Abstract

Abstract is missing.