A nondestructive automated defect detection system for silicon carbide wafers

Toshiro Kubota, Parag Talekar, Xianyun Ma, Tangali S. Sudarshan. A nondestructive automated defect detection system for silicon carbide wafers. Mach. Vis. Appl., 16(3):170-176, 2005. [doi]

Authors

Toshiro Kubota

This author has not been identified. Look up 'Toshiro Kubota' in Google

Parag Talekar

This author has not been identified. Look up 'Parag Talekar' in Google

Xianyun Ma

This author has not been identified. Look up 'Xianyun Ma' in Google

Tangali S. Sudarshan

This author has not been identified. Look up 'Tangali S. Sudarshan' in Google