Toshiro Kubota, Parag Talekar, Xianyun Ma, Tangali S. Sudarshan. A nondestructive automated defect detection system for silicon carbide wafers. Mach. Vis. Appl., 16(3):170-176, 2005. [doi]
@article{KubotaTMS05,
title = {A nondestructive automated defect detection system for silicon carbide wafers},
author = {Toshiro Kubota and Parag Talekar and Xianyun Ma and Tangali S. Sudarshan},
year = {2005},
doi = {10.1007/s00138-004-0169-y},
url = {http://dx.doi.org/10.1007/s00138-004-0169-y},
researchr = {https://researchr.org/publication/KubotaTMS05},
cites = {0},
citedby = {0},
journal = {Mach. Vis. Appl.},
volume = {16},
number = {3},
pages = {170-176},
}