Modeling and simulation of an active restoring mechanism for high reliability switches in RF-MEMS technology

T. Kuenzig, G. Schrag, J. Iannacci. Modeling and simulation of an active restoring mechanism for high reliability switches in RF-MEMS technology. Microelectronics Reliability, 52(9-10):2235-2239, 2012. [doi]

Abstract

Abstract is missing.