Strategy for 3D Ferroelectric Transistor: Critical Surface Orientation Dependence of HfZrOx on Si - researchr publication authors

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Song-Hyeon Kuk, Jae Hoon Han, Bong-Ho Kim, Joon Pyo Kim, Sang-Hyeon Kim. Strategy for 3D Ferroelectric Transistor: Critical Surface Orientation Dependence of HfZrOx on Si. In 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023. pages 1-2, IEEE, 2023. [doi]

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