Strategy for 3D Ferroelectric Transistor: Critical Surface Orientation Dependence of HfZrOx on Si - researchr publication

researchr

You are not signed in
Sign in
Sign up

Song-Hyeon Kuk, Jae Hoon Han, Bong-Ho Kim, Joon Pyo Kim, Sang-Hyeon Kim. Strategy for 3D Ferroelectric Transistor: Critical Surface Orientation Dependence of HfZrOx on Si. In 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023. pages 1-2, IEEE, 2023. [doi]

Abstract is missing.

runs on WebDSL