Fabrication and characterization of pressure sensor, and enhancement of output characteristics by modification of operating pressure range

S. Santosh Kumar, B. D. Pant. Fabrication and characterization of pressure sensor, and enhancement of output characteristics by modification of operating pressure range. In 19th International Symposium on VLSI Design and Test, VDAT 2015, Ahmedabad, India, June 26-29, 2015. pages 1-4, IEEE, 2015. [doi]

Abstract

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