Protection Schemes for Plasma Induced Damage from Well-Side Antennas

Hsi-Yu Kuo, Yu-Lin Chu, Hung-Da Dai, Chun-Chi Wang, Pei-Jung Lin, Ethan Guo, Yu-Ti Su, Chia-Lin Hsu, Kuan-Hung Chen, Tsung-Yuan Chen, Ryan Lu, Victor Liang, Kuo-Ji Chen, Kejun Xia. Protection Schemes for Plasma Induced Damage from Well-Side Antennas. In IEEE International Reliability Physics Symposium, IRPS 2023, Monterey, CA, USA, March 26-30, 2023. pages 1-5, IEEE, 2023. [doi]

Abstract

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