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Modeling and Performance Evaluation of a Controlled IC Fab using Distributed Colored Timed Petri Net

Chung-Hsien Kuo, Han-Pang Huang. Modeling and Performance Evaluation of a Controlled IC Fab using Distributed Colored Timed Petri Net. In Proceedings of the 2000 IEEE International Conference on Robotics and Automation, ICRA 2000, April 24-28, 2000, San Francisco, CA, USA. pages 2191-2196, IEEE, 2000.

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Chung-Hsien Kuo

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Han-Pang Huang

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