Modeling and Performance Evaluation of a Controlled IC Fab using Distributed Colored Timed Petri Net

Chung-Hsien Kuo, Han-Pang Huang. Modeling and Performance Evaluation of a Controlled IC Fab using Distributed Colored Timed Petri Net. In Proceedings of the 2000 IEEE International Conference on Robotics and Automation, ICRA 2000, April 24-28, 2000, San Francisco, CA, USA. pages 2191-2196, IEEE, 2000.

@inproceedings{KuoH00:2,
  title = {Modeling and Performance Evaluation of a Controlled IC Fab using Distributed Colored Timed Petri Net},
  author = {Chung-Hsien Kuo and Han-Pang Huang},
  year = {2000},
  tags = {modeling},
  researchr = {https://researchr.org/publication/KuoH00%3A2},
  cites = {0},
  citedby = {0},
  pages = {2191-2196},
  booktitle = {Proceedings of the 2000 IEEE International Conference on Robotics and Automation, ICRA 2000, April 24-28, 2000, San Francisco, CA, USA},
  publisher = {IEEE},
  isbn = {0-7803-5889-9},
}