Trial fabrication of micron sized arm using reversible TiNi alloy thin film actuators

Katsutoshi Kuribayashi, Seiji Shimizu, T. Nishinohara, Takao Taniguchi, M. Yoshitake, S. Ogawa. Trial fabrication of micron sized arm using reversible TiNi alloy thin film actuators. In Proceedings of 1993 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 1993, Tokyo, Japan, July 26 - 30, 1993. pages 1697-1702, IEEE, 1993. [doi]

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