Cu-Cu Bonding Challenges with 'i-ACF' for Advanced 3D Integration

Shunji Kurooka, Yoshinori Hotta, Ai Nakamura, Mitsumasa Koyanagi, Takafumi Fukushima. Cu-Cu Bonding Challenges with 'i-ACF' for Advanced 3D Integration. In 2019 International 3D Systems Integration Conference (3DIC), Sendai, Japan, October 8-10, 2019. pages 1-4, IEEE, 2019. [doi]

@inproceedings{KurookaHNKF19,
  title = {Cu-Cu Bonding Challenges with 'i-ACF' for Advanced 3D Integration},
  author = {Shunji Kurooka and Yoshinori Hotta and Ai Nakamura and Mitsumasa Koyanagi and Takafumi Fukushima},
  year = {2019},
  doi = {10.1109/3DIC48104.2019.9058773},
  url = {https://doi.org/10.1109/3DIC48104.2019.9058773},
  researchr = {https://researchr.org/publication/KurookaHNKF19},
  cites = {0},
  citedby = {0},
  pages = {1-4},
  booktitle = {2019 International 3D Systems Integration Conference (3DIC), Sendai, Japan, October 8-10, 2019},
  publisher = {IEEE},
  isbn = {978-1-7281-4870-0},
}