High performance silicon MEMS for niche market applications

Andrès E. Lagos. High performance silicon MEMS for niche market applications. In Claudionor José Nunes Coelho Jr., Ricardo P. Jacobi, Jürgen Becker, editors, Proceedings of the 19th Annual Symposium on Integrated Circuits and Systems Design, SBCCI 2006, Ouro Preto, MG, Brazil, August 28 - September 1, 2006. pages 8, ACM, 2006. [doi]

@inproceedings{Lagos06,
  title = {High performance silicon MEMS for niche market applications},
  author = {Andrès E. Lagos},
  year = {2006},
  doi = {10.1145/1150343.1150345},
  url = {http://doi.acm.org/10.1145/1150343.1150345},
  tags = {e-science},
  researchr = {https://researchr.org/publication/Lagos06},
  cites = {0},
  citedby = {0},
  pages = {8},
  booktitle = {Proceedings of the 19th Annual Symposium on Integrated Circuits and Systems Design, SBCCI 2006, Ouro Preto, MG, Brazil, August 28 - September 1, 2006},
  editor = {Claudionor José Nunes Coelho Jr. and Ricardo P. Jacobi and Jürgen Becker},
  publisher = {ACM},
}