Andrès E. Lagos. High performance silicon MEMS for niche market applications. In Claudionor José Nunes Coelho Jr., Ricardo P. Jacobi, Jürgen Becker, editors, Proceedings of the 19th Annual Symposium on Integrated Circuits and Systems Design, SBCCI 2006, Ouro Preto, MG, Brazil, August 28 - September 1, 2006. pages 8, ACM, 2006. [doi]
Abstract is missing.