Memory Window in Si: HfO2 FeRAM arrays: Performance Improvement and Extrapolation at Advanced Nodes

J. Laguerre, Marc Bocquet, Olivier Billoint, S. Martin, Jean Coignus, Catherine Carabasse, T. Magis, T. Dewolf, François Andrieu, Laurent Grenouillet. Memory Window in Si: HfO2 FeRAM arrays: Performance Improvement and Extrapolation at Advanced Nodes. In IEEE International Memory Workshop, IMW 2023, Monterey, CA, USA, May 21-24, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

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