Pedram Lajevardi, Vladimir P. Petkov, Boris Murmann. A ΔΣ interface for MEMS accelerometers using electrostatic spring-constant modulation for cancellation of bondwire capacitance drift. In 2012 IEEE International Solid-State Circuits Conference, ISSCC 2012, San Francisco, CA, USA, February 19-23, 2012. pages 196-198, IEEE, 2012. [doi]
Abstract is missing.