Verification of analytic point defect models using SUPREM-IV [dopant diffusion]

Mark E. Law, Robert W. Dutton. Verification of analytic point defect models using SUPREM-IV [dopant diffusion]. IEEE Trans. on CAD of Integrated Circuits and Systems, 7(2):181-190, 1988. [doi]

Authors

Mark E. Law

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Robert W. Dutton

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