Verification of analytic point defect models using SUPREM-IV [dopant diffusion]

Mark E. Law, Robert W. Dutton. Verification of analytic point defect models using SUPREM-IV [dopant diffusion]. IEEE Trans. on CAD of Integrated Circuits and Systems, 7(2):181-190, 1988. [doi]

@article{LawD88,
  title = {Verification of analytic point defect models using SUPREM-IV [dopant diffusion]},
  author = {Mark E. Law and Robert W. Dutton},
  year = {1988},
  doi = {10.1109/43.3148},
  url = {http://doi.ieeecomputersociety.org/10.1109/43.3148},
  tags = {e-science},
  researchr = {https://researchr.org/publication/LawD88},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
  volume = {7},
  number = {2},
  pages = {181-190},
}