Self-Sensing of Oscillation in Parametrically-Resonant MEMS Mirrors with Uncertain Nonlinear Dynamics

Miki Lee, Cameron Harris, Haijun Li, Xiyu Duan, Yi Chen, Thomas D. Wang, Kenn R. Oldham. Self-Sensing of Oscillation in Parametrically-Resonant MEMS Mirrors with Uncertain Nonlinear Dynamics. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2021, Delft, The Netherlands, July 12-16, 2021. pages 364-370, IEEE, 2021. [doi]

Abstract

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