Non-ideal behavior of a driving resonator loop in a vibratory capacitive microgyroscope

Ahra Lee, Hyoungho Ko, Dong-Il Cho, Gunn Hwang. Non-ideal behavior of a driving resonator loop in a vibratory capacitive microgyroscope. Microelectronics Journal, 39(1):1-6, 2008. [doi]

Authors

Ahra Lee

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Hyoungho Ko

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Dong-Il Cho

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Gunn Hwang

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