Non-ideal behavior of a driving resonator loop in a vibratory capacitive microgyroscope

Ahra Lee, Hyoungho Ko, Dong-Il Cho, Gunn Hwang. Non-ideal behavior of a driving resonator loop in a vibratory capacitive microgyroscope. Microelectronics Journal, 39(1):1-6, 2008. [doi]

Abstract

Abstract is missing.