Machine Learning-Based Periodic Setup Changes for Semiconductor Manufacturing Machines

Je-Hun Lee, Hyun-jung Kim, Young Kim, Yun Bae Kim, Byung-Hee Kim, Gu-Hwan Chung. Machine Learning-Based Periodic Setup Changes for Semiconductor Manufacturing Machines. In Winter Simulation Conference, WSC 2021, Phoenix, AZ, USA, December 12-15, 2021. pages 1-10, IEEE, 2021. [doi]

Abstract

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