BEOL Compatible Ultra-Low Operating Voltage (0.5 V) and Preconfigured Switching Polarization States in Effective 3 nm Ferroelectric HZO Capacitors

Minjong Lee, Jin Hyun Kim, Dan N. Le, Seojun Lee, Si-Un Song, Rino Choi, Youngbae Ahn, Seung Wook Ryu, Pil-Ryung Cha, Chang-Yong Nam, Seongbin Park, Jongmug Kang, Si Joon Kim, Jiyoung Kim. BEOL Compatible Ultra-Low Operating Voltage (0.5 V) and Preconfigured Switching Polarization States in Effective 3 nm Ferroelectric HZO Capacitors. In IEEE Symposium on VLSI Technology and Circuits 2024, Honolulu, HI, USA, June 16-20, 2024. pages 1-2, IEEE, 2024. [doi]

Abstract

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