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An integrated application framework for a cluster tool controller for semiconductor manufacturing

Tae-Eog Lee, Jin-Hwan Lee. An integrated application framework for a cluster tool controller for semiconductor manufacturing. In Proceedings of 8th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2001, October 15-18, 2001, Antibes/Juan les Pins, France - Volume 2. pages 775-778, IEEE, 2001. [doi]

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Tae-Eog Lee

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Jin-Hwan Lee

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