Tae-Eog Lee, Jin-Hwan Lee. An integrated application framework for a cluster tool controller for semiconductor manufacturing. In Proceedings of 8th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2001, October 15-18, 2001, Antibes/Juan les Pins, France - Volume 2. pages 775-778, IEEE, 2001. [doi]
Abstract is missing.