Tae-Eog Lee, Jin-Hwan Lee. An integrated application framework for a cluster tool controller for semiconductor manufacturing. In Proceedings of 8th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2001, October 15-18, 2001, Antibes/Juan les Pins, France - Volume 2. pages 775-778, IEEE, 2001. [doi]
@inproceedings{LeeL01-5,
title = {An integrated application framework for a cluster tool controller for semiconductor manufacturing},
author = {Tae-Eog Lee and Jin-Hwan Lee},
year = {2001},
doi = {10.1109/ETFA.2001.997780},
url = {http://dx.doi.org/10.1109/ETFA.2001.997780},
researchr = {https://researchr.org/publication/LeeL01-5},
cites = {0},
citedby = {0},
pages = {775-778},
booktitle = {Proceedings of 8th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2001, October 15-18, 2001, Antibes/Juan les Pins, France - Volume 2},
publisher = {IEEE},
isbn = {0-7803-7241-7},
}