3-MEMS CMOS Integrated E-Nose with Embedded 4×Gas Sensors, a Temperature Sensor and a Relative Humidity Sensor

Si Hoon Lee, Kwangmin Park, Jaeheung Lim, Minchul Lee, Jeongho Park, Hyun Kim, Young Ok Lee, Hyun Su Ahn, Eunseok Shin, Hyungjong Ko, Seoung-Jae Yoo, Hyunsurk Ryu, Yongin Park, Joonseok Kim, Long Yan. 3-MEMS CMOS Integrated E-Nose with Embedded 4×Gas Sensors, a Temperature Sensor and a Relative Humidity Sensor. In 2020 IEEE International Solid- State Circuits Conference, ISSCC 2020, San Francisco, CA, USA, February 16-20, 2020. pages 316-318, IEEE, 2020. [doi]

Abstract

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