Jaesik Lee, Joseph Weiner, Hsin-Hung Chen, Yves Baeyens, Vladimir Aksyuk, Young-Kai Chen. CMOS-Based MEMS Mirror Driver for Maskless Lithography Systems. In Proceedings of the IEEE 2007 Custom Integrated Circuits Conference, CICC 2007, DoubleTree Hotel, San Jose, California, USA, September 16-19, 2007. pages 401-404, IEEE, 2007. [doi]
@inproceedings{LeeWCBAC07,
title = {CMOS-Based MEMS Mirror Driver for Maskless Lithography Systems},
author = {Jaesik Lee and Joseph Weiner and Hsin-Hung Chen and Yves Baeyens and Vladimir Aksyuk and Young-Kai Chen},
year = {2007},
doi = {10.1109/CICC.2007.4405762},
url = {http://dx.doi.org/10.1109/CICC.2007.4405762},
researchr = {https://researchr.org/publication/LeeWCBAC07},
cites = {0},
citedby = {0},
pages = {401-404},
booktitle = {Proceedings of the IEEE 2007 Custom Integrated Circuits Conference, CICC 2007, DoubleTree Hotel, San Jose, California, USA, September 16-19, 2007},
publisher = {IEEE},
isbn = {978-1-4244-1623-3},
}