Jaesik Lee, Joseph Weiner, Hsin-Hung Chen, Yves Baeyens, Vladimir Aksyuk, Young-Kai Chen. CMOS-Based MEMS Mirror Driver for Maskless Lithography Systems. In Proceedings of the IEEE 2007 Custom Integrated Circuits Conference, CICC 2007, DoubleTree Hotel, San Jose, California, USA, September 16-19, 2007. pages 401-404, IEEE, 2007. [doi]
Abstract is missing.