J. H. Lee, B. W. Woo, Y. M. Lee, N. H. Lee, S.-H. Lee, Y. S. Lee, H. S. Kim, S. Pae. Reliability Improvement with Optimized BEOL Process in Advanced DRAM. In IEEE International Reliability Physics Symposium, IRPS 2023, Monterey, CA, USA, March 26-30, 2023. pages 1-4, IEEE, 2023. [doi]
@inproceedings{LeeWLLLLKP23,
title = {Reliability Improvement with Optimized BEOL Process in Advanced DRAM},
author = {J. H. Lee and B. W. Woo and Y. M. Lee and N. H. Lee and S.-H. Lee and Y. S. Lee and H. S. Kim and S. Pae},
year = {2023},
doi = {10.1109/IRPS48203.2023.10118168},
url = {https://doi.org/10.1109/IRPS48203.2023.10118168},
researchr = {https://researchr.org/publication/LeeWLLLLKP23},
cites = {0},
citedby = {0},
pages = {1-4},
booktitle = {IEEE International Reliability Physics Symposium, IRPS 2023, Monterey, CA, USA, March 26-30, 2023},
publisher = {IEEE},
isbn = {978-1-6654-5672-2},
}