Reliability Improvement with Optimized BEOL Process in Advanced DRAM

J. H. Lee, B. W. Woo, Y. M. Lee, N. H. Lee, S.-H. Lee, Y. S. Lee, H. S. Kim, S. Pae. Reliability Improvement with Optimized BEOL Process in Advanced DRAM. In IEEE International Reliability Physics Symposium, IRPS 2023, Monterey, CA, USA, March 26-30, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

Abstract is missing.