Fabrication of 3D MEMS toroidal microinductor for high temperature application - researchr publication authors

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Chong Lei, Yong Zhou, Xiao Yu Gao, Wen Ding, Ying Cao, Zhi-Min Zhou, Hyung Choi. Fabrication of 3D MEMS toroidal microinductor for high temperature application. Microelectronics Journal, 37(11):1347-1351, 2006. [doi]

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