Fabrication of 3D MEMS toroidal microinductor for high temperature application

Chong Lei, Yong Zhou, Xiao Yu Gao, Wen Ding, Ying Cao, Zhi-Min Zhou, Hyung Choi. Fabrication of 3D MEMS toroidal microinductor for high temperature application. Microelectronics Journal, 37(11):1347-1351, 2006. [doi]

@article{LeiZGDCZC06,
  title = {Fabrication of 3D MEMS toroidal microinductor for high temperature application},
  author = {Chong Lei and Yong Zhou and Xiao Yu Gao and Wen Ding and Ying Cao and Zhi-Min Zhou and Hyung Choi},
  year = {2006},
  doi = {10.1016/j.mejo.2006.07.005},
  url = {http://dx.doi.org/10.1016/j.mejo.2006.07.005},
  researchr = {https://researchr.org/publication/LeiZGDCZC06},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Journal},
  volume = {37},
  number = {11},
  pages = {1347-1351},
}