Feedback Control Strategy for a High Speed Differential Piezo-Driven Stage by an Exclusive use of Piezoelectric Sensors

Freddy Romero Leiro, Ali Bazaei, Stéphane Régnier, Mokrane Boudaoud. Feedback Control Strategy for a High Speed Differential Piezo-Driven Stage by an Exclusive use of Piezoelectric Sensors. In American Control Conference, ACC 2022, Atlanta, GA, USA, June 8-10, 2022. pages 4389-4396, IEEE, 2022. [doi]

Abstract

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