Aaron Lewis, Efim Shambrot, Anna Radko, Klony Lieberman, Solomon Ezekiel, Dimitry Veinger, Gila Yampolski. Failure analysis of integrated circuits beyond the diffraction limit: contact mode near-field scanning optical microscopy with integrated resistance, capacitance, and UV confocal imaging. Proceedings of the IEEE, 88(9):1471-1479, 2000. [doi]
Abstract is missing.