Improved reliability characteristics of Ge MOS devices by capping Hf or Zr on interfacial layer

Yan Lin Li, Kuei-Shu Chang-Liao, Yu-wei Chang, Tse-Jung Huang, Chen-Chien Li, Zhao-Chen Gu, Po-Yen Chen, Tzung-Yu Wu, Jiayi Huang, Fu-Chuan Chu, Shih-Han Yi. Improved reliability characteristics of Ge MOS devices by capping Hf or Zr on interfacial layer. Microelectronics Reliability, 79:136-139, 2017. [doi]

Authors

Yan Lin Li

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Kuei-Shu Chang-Liao

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Yu-wei Chang

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Tse-Jung Huang

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Chen-Chien Li

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Zhao-Chen Gu

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Po-Yen Chen

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Tzung-Yu Wu

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Jiayi Huang

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Fu-Chuan Chu

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Shih-Han Yi

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