Xiaoliang Li, Vincent P. J. Chung, Metin G. Guney, Tamal Mukherjee, Gary K. Fedder, Jeyanandh Paramesh. A Reconfigurable High-Bandwidth CMOS-MEMS Capacitive Accelerometer Array with High-g Measurement Capability and Low Bias Instability. In IEEE Symposium on VLSI Circuits, VLSI Circuits 2020, Honolulu, HI, USA, June 16-19, 2020. pages 1-2, IEEE, 2020. [doi]
Abstract is missing.