Qingkun Li, Lei Cao, Qingzhu Zhang, Lianlian Li, Xuexiang Zhang, Chuqiao Niu, Guanqiao Sang, Yunjiao Bao, Huaxiang Yin, Zhenhua Wu. Source/drain extension asymmetric counter-doping for suppressing channel leakage in stacked nanosheet transistors. Microelectronics Journal, 151:106347, 2024. [doi]
Abstract is missing.