Study of silicon nitride film embedded with silicon quantum dots

Pei Ling Li, Chie Gau, Bau Tong Dai, Chien-Wei Liu. Study of silicon nitride film embedded with silicon quantum dots. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 646-649, IEEE, 2011. [doi]

Authors

Pei Ling Li

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Chie Gau

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Bau Tong Dai

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Chien-Wei Liu

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