Pei Ling Li, Chie Gau, Bau Tong Dai, Chien-Wei Liu. Study of silicon nitride film embedded with silicon quantum dots. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 646-649, IEEE, 2011. [doi]
@inproceedings{LiGDL11-0,
title = {Study of silicon nitride film embedded with silicon quantum dots},
author = {Pei Ling Li and Chie Gau and Bau Tong Dai and Chien-Wei Liu},
year = {2011},
doi = {10.1109/NEMS.2011.6017438},
url = {http://dx.doi.org/10.1109/NEMS.2011.6017438},
researchr = {https://researchr.org/publication/LiGDL11-0},
cites = {0},
citedby = {0},
pages = {646-649},
booktitle = {6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011},
publisher = {IEEE},
}