Katherine Shu-Min Li, Peter Yi-Yu Liao, Leon Chou, Ken Chau-Cheung Cheng, Andrew Yi-Ann Huang, Sying-Jyan Wang, Gus Chang-Hung Han. PWS: Potential Wafermap Scratch Defect Pattern Recognition with Machine Learning Techniques. In IEEE European Test Symposium, ETS 2020, Tallinn, Estonia, May 25-29, 2020. pages 1-6, IEEE, 2020. [doi]
Abstract is missing.