Design and fabrication of an in-plane SOI MEMS accelerometer with a high yield rate - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

Pengcheng Li, Xiaoying Li, Enfu Li, Qiang Shen, Honglong Chang. Design and fabrication of an in-plane SOI MEMS accelerometer with a high yield rate. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 511-514, IEEE, 2015. [doi]

This author has not been identified. Look up 'Pengcheng Li' in GoogleThis author has not been identified. Look up 'Xiaoying Li' in GoogleThis author has not been identified. Look up 'Enfu Li' in GoogleThis author has not been identified. Look up 'Qiang Shen' in GoogleThis author has not been identified. Look up 'Honglong Chang' in Google

runs on WebDSL