Pengcheng Li, Xiaoying Li, Enfu Li, Qiang Shen, Honglong Chang. Design and fabrication of an in-plane SOI MEMS accelerometer with a high yield rate. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 511-514, IEEE, 2015. [doi]
@inproceedings{LiLLSC15,
title = {Design and fabrication of an in-plane SOI MEMS accelerometer with a high yield rate},
author = {Pengcheng Li and Xiaoying Li and Enfu Li and Qiang Shen and Honglong Chang},
year = {2015},
doi = {10.1109/NEMS.2015.7147480},
url = {http://dx.doi.org/10.1109/NEMS.2015.7147480},
researchr = {https://researchr.org/publication/LiLLSC15},
cites = {0},
citedby = {0},
pages = {511-514},
booktitle = {10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015},
publisher = {IEEE},
isbn = {978-1-4673-6695-3},
}