Pengcheng Li, Xiaoying Li, Enfu Li, Qiang Shen, Honglong Chang. Design and fabrication of an in-plane SOI MEMS accelerometer with a high yield rate. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 511-514, IEEE, 2015. [doi]
Abstract is missing.