Die-level photolithography and etchless parylene packaging processes for on-CMOS electrochemical biosensors

Lin Li, Xiaowen Liu, Andrew J. Mason. Die-level photolithography and etchless parylene packaging processes for on-CMOS electrochemical biosensors. In 2012 IEEE International Symposium on Circuits and Systems, ISCAS 2012, Seoul, Korea (South), May 20-23, 2012. pages 2401-2404, IEEE, 2012. [doi]

Abstract

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