A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor

Yan Li, Hao Li, Yifeng Xiao, Le Cao, Zhanshe Guo. A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor. Sensors, 21(7):2545, 2021. [doi]

Authors

Yan Li

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Hao Li

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Yifeng Xiao

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Le Cao

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Zhanshe Guo

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